Micromachined relay and method of forming the relay

Micromachined silicon probe for scanning probe microscopy

Micromachined vertical vibrating gyroscope

Micromachining method and micromachined structure

Micromachining methods for making micromechanical moving structu

Micromechanical barb and method for making the same

Micromechanical component and method for producing the same

Micromechanical component and method for producing the same

Micromechanical component and production method

Micromechanical component with a dielectric movable structure, m

Micromechanical mass flow sensor and method for the...

Micromechanical part and method for its manufacture

Micromirror device and a method of making the same

Micromirror for a hybrid optoelectronic integrated circuit, a me

Micromirror unit and method of making the same

Microneedle array module and method of fabricating the same

Microneedle structure and production method therefor

Microstructure gas valve control forming method

Microstructures and methods of fabrication thereof

Microwave plasma discharge device