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Electrostatic chuck for magnetic flux processing

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck for preventing an arc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck for substrate stage, electrode used for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck for wafer metrology and inspection...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck for wafer metrology and inspection...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having a combination electrode structure for

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having a plurality of gas inlet channels

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having a thermal transfer regulator pad

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having a unidirectionally conducting coupler

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having an electrical connector with housing

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having bonded structure and method of...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having composite dielectric layer and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having gas cavity and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having heater and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having improved electrical connector and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having improved erosion resistance

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck having improved gas conduits

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having relatively thick and thin areas and m

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having replaceable dielectric cover

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck having tapered electrodes

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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