Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1990-09-07
1991-10-08
Pellinen, A. D.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279 1M, 29829, H02N 1300
Patent
active
050559648
ABSTRACT:
An electrostatic chuck is provided with an electrode split into two sections. The separate sections are joined through a tapered joint and bonded using epoxy. An insulator electrically separates the two sections and covers the top of the joined sections to form a clamping surface. The geometry of the electrode forms three annular regions, dividing the clamping surface into two equal areas distributed symmetrically. Moreover, the split-ring electrostatic chuck just described is fabricated by forming the two, separate electrodes; coating the separate electrodes with an insulator; joining the electrodes; machining the joint, top surface of the electrodes to form a single, co-planar, flat, smooth surface; and applying an insulator to that top surface.
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H. Bohlen, et al. "Workpiece Holder", Technical Disclosure Bulletin, vol. 20, No. 1 (Jun. 1977).
G. Wardley, "Electrostatic Wafer Chuck for Electron Beam Microfabrication", Rev. Sci. Instrum., vol. 44, No. 10 (Oct. 1973).
G. Fortuno et al. "Electrostatic Wafer Holder for Wafer Cooling During Reactive Ion Etching", IBM Technical Disclosure Bulletin, vol., 31, No. 1 (Jun. 1988).
Logan Joseph S.
Ruckel Raymond R.
Tompkins Robert E.
Westerfield, Jr. Robert P.
Elms Richard T.
International Business Machines - Corporation
Pellinen A. D.
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