Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1997-11-06
2000-08-22
Sherry, Michael J.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
061081892
ABSTRACT:
An electrostatic chuck 100 useful for holding a substrate 55 in a high density plasma, comprises a dielectric covered electrode 110 having at least one heat transfer gas flow conduit 150 therein. An electrical isolator 200 comprising dielectric material is positioned in the gas flow conduit 150 to (i) electrically isolate the gas in the conduit from the plasma or electrode 110, and (ii) allow passage of heat transfer gas through the conduit. Preferably, the dielectric material comprises a plasma-deactivating material that has a high surface area that reduces plasma formation of gas passing through the conduit 150 in a plasma process. A semiconducting dielectric member 115 useful for rapidly charging and discharging electrostatic chucks is also described.
REFERENCES:
patent: 4412133 (1983-10-01), Eckes et al.
patent: 5258047 (1993-11-01), Tokisue et al.
patent: 5542559 (1996-08-01), Kawakami et al.
patent: 5720818 (1998-02-01), Donde et al.
patent: 5886863 (1999-03-01), Nagasaki et al.
PCT Search Report dated Sep. 10, 1999.
Collins Kenneth S.
Donde Arik
Dyer Timothy
Grimard Dennis S.
Kats Semyon L.
Applied Materials Inc.
Sherry Michael J.
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