Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1997-06-27
1999-11-02
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
059782021
ABSTRACT:
An electrostatic chuck 75 for holding a substrate 25 in a process chamber 20, comprises an electrostatic member 80 including an insulator having an electrode 95 therein and a receiving surface for receiving the substrate. A base 85 supports the electrostatic member, the base having a first thermal resistance R.sub.B and having a lower surface that rests on the process chamber. A thermal transfer regulator pad 100 is positioned between the receiving surface of the electrostatic member and the lower surface of the base, the thermal pad comprising a second thermal resistance R.sub.P that is sufficiently higher or lower than the thermal resistance R.sub.B of the base, to provide a predetermined temperature profile across a processing surface of the substrate during processing in the chamber.
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U.S. Patent Application entitled, "Electrostatic Chuck with Conformal Insulator Film"; filed Jan. 31, 1995; Serial No. 08/381,786; Inventors: Shamouilian, et al.; Attorney Docket No. 527.P1.
Deshmukh Shashank C.
Guenther Rolf A.
Jiang Wei-nan
Kumar Ajay
Wadensweiler Ralph M.
Applied Materials Inc.
Fleming Fritz
Janah Ashok
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