Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1998-05-22
2000-06-06
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
060726857
ABSTRACT:
An electrostatic chuck 20 useful for holding a substrate 25 in a process chamber 30 that is chargeable by a voltage provided by a voltage supply terminal 60 in the process chamber. The electrostatic chuck 20 comprises a dielectric member 40 covering an electrode 35, optionally, a base 50 below the dielectric member, and at least one electrical connector 55 capable of providing an electrical connection between the electrode 35 and the voltage supply terminal 60 in the process chamber 30. The electrical connector 55 comprises an electrical conductor 65, which passes through the base 50 and electrically connects the electrode 35 to a voltage supply terminal 60 in the chamber 30 and a housing 70 surrounding the electrical conductor 65. In one version, the housing 70 is expandable to provide a substantially gas sealed environment around the electrical conductor 65. Preferably, the housing 70 comprises channels 255 having dimensions sized sufficiently small to reduce arcing and plasma discharge of gas in the housing 70 during use of the chuck 20 in the process chamber 30.
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PCT International Search Report Dated Aug. 11, 1999.
Applied Materials Inc.
Fleming Fritz
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