Apparatus for retaining a workpiece in a process chamber within
Apparatus for retaining a workpiece upon a workpiece support...
Apparatus for the rapid continuous corona poling of polymeric fi
Article comprising a casimir force modulator and methods...
Automatic discharge apparatus for residual charge on an...
Backside gas quick dump apparatus for a semiconductor wafer proc
Barrier seal for electrostatic chuck
Bead or particle manipulating chucks
Bi-stable memory element
Bias-tracking D.C. power circuit for an electrostatic chuck
Billboard device
Bipolar carrier wafer and mobile bipolar electrostatic wafer...
Bipolar electrostatic chuck and method of making same
Bonding member and electrostatic chuck
Casimir effect conversion
Cathode assembly containing an electrostatic chuck for...
Ceramic electrostatic chuck
Ceramic electrostatic chuck and method
Ceramic electrostatic chuck and method of fabricating same
Ceramic electrostatic chuck assembly and method of making