Bonding member and electrostatic chuck

Details Bonding member and electrostatic chuck Bonding member and electrostatic chuck

2007-05-15

2007-05-15

Jackson, Stephen W. (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C228S122100

Reexamination Certificate

active

10790259

ABSTRACT:
A bonding member is provided, including, a ceramic member having a concave portion, a metal member having a convex portion corresponding to the concave portion of the ceramic member. A first bonding material joins a bottom portion of the concave portion of the ceramic member and a tip portion of the convex portion of the metal member. The first bonding material has a porous structure, including particles and a brazing filler metal, and covers a corner between tip and side portions of the metal member. A second bonding material including a brazing filler metal joins the side portion of the concave portion of the ceramic member and the side portion of the convex portion of the metal member.

REFERENCES:
patent: 5670063 (1997-09-01), Hegner et al.
patent: 5777838 (1998-07-01), Tamagawa et al.
patent: 5995357 (1999-11-01), Ushikoshi et al.
patent: 11-228245 (1999-08-01), None
patent: 2000-344584 (2000-12-01), None
patent: 2001-010873 (2001-01-01), None
patent: 2001-122673 (2001-05-01), None
patent: WO 01/63972 (2001-08-01), None

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