Single stage microactuator for multidimensional actuation...
Slider displacement direction conversion mechanism in...
Solid state transducer for converting between an electrical...
Spiral wound transducer
Split spring providing multiple electrical leads for MEMS...
Stable electro-mechanical comb drive actuators
Stepping actuator and method of manufacture therefore
Stress release mechanism in MEMS device and method of making...
Structure containing organic molecular layer and use thereof
Supporting insulating column of high voltage accelerator
Switching arrangement for a radiation guide
Systems and methods for improved control of...
Thin laminate construction for the creation of tactile feedback
Tiltable electrostatic microactuator and method for using same
Torsional electrostatic actuator
Transport apparatus
Tuneable microelectromechanical system resonator
Tuning fork type gyroscope
Two-axis device and manufacturing method therefor
Two-axis micro-actuator with multidimensional actuation with...