Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2006-05-18
2009-06-16
Tamai, Karl I (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
C318S116000
Reexamination Certificate
active
07548011
ABSTRACT:
Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.
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Borovic Bruno
Lewis Frank L.
Liu Ai Qun
Popa Dan O.
Fulbright & Jaworski LLP
Tamai Karl I
The Board of Regents of the University of Texas System
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