Two-axis micro-actuator with multidimensional actuation with...

Details Two-axis micro-actuator with multidimensional actuation with... Two-axis micro-actuator with multidimensional actuation with...

2007-07-24

2007-07-24

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

Reexamination Certificate

active

10922861

ABSTRACT:
Provided is a two-axis actuator having a large stage area. The two-axis actuator includes a stage moving in two directions and connected to an upper part of an inertial part. The two-axis actuator is configured to maximize a stage area relative to the overall area of the actuator, thereby increasing the data storage capacity of the stage.

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C.-H. Kim et al., “Fabrication of Micro XY-Stage with Large-Area Rectangular Shuttle Using Anodic Bonding Process”, Transducers '01 Eurosensors XV, Jun. 14, 2001, pp. 752-755, XP009040206.

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