Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent
2000-02-29
2000-12-12
Ramirez, Nestor
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
414935, 414936, 310 12, B65G 4907, H01L 2100
Patent
active
061603384
ABSTRACT:
A transport apparatus for holding and transporting a conductive, planar object without contact is provided. The transport apparatus includes pairs of floating-use electrodes to which a certain potential difference is applied to produce electrostatic attraction force for attracting and floating the object in a non-contact state, pairs of driving-use electrodes to which suitable potential differences are applied to cause currents to flow in portions of the object that face these electrodes, and magnetic devices for generating magnetic fields that interact with the currents to produce drive forces or Lorentz forces acting on the object. The transport apparatus further includes displacement sensors for measuring the position of the object in a two-dimensional plane parallel to the carrying surface of the apparatus, and a control device that controls the potential differences applied to the driving-use electrode pairs and the intensity of the magnetic fields, based on measurement results of the displacement meters.
REFERENCES:
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patent: 5196745 (1993-03-01), Trumper
patent: 5789843 (1998-08-01), Higuchi et al.
patent: 5796467 (1998-08-01), Suzuki
Ford, Roger, et al., Noncontact Semiconductor Wafer Handling, Technical Paper, MS90-478, Society of Manufacturing Engineers, 1990, pp. 1-10. (Month Unknown).
Jones Judson H.
Nikon Corporation
Ramirez Nestor
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