Torsional electrostatic actuator

Details Torsional electrostatic actuator Torsional electrostatic actuator

2007-08-07

2007-08-07

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000, C359S225100

Reexamination Certificate

active

11140313

ABSTRACT:
Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least one of the moveable electrode plates is connected to at least one arm of a moveable electrode plate on the opposite side of the fixed electrode plate, e.g., by a spring. The electrode plates may have comb projections. A post may be coupled at one of its ends to the top of one of the moveable electrode plates, and the post's other end is coupled to a plate, e.g., a mirror or other structure to be moved.

REFERENCES:
patent: 6593677 (2003-07-01), Behin et al.
patent: 6760144 (2004-07-01), Hill et al.
patent: 6791735 (2004-09-01), Stappaerts
patent: 6872947 (2005-03-01), Greywall
patent: 7081982 (2006-07-01), Shimazu et al.
patent: 7088493 (2006-08-01), Alain et al.
patent: 2004/0140733 (2004-07-01), Keller

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