Stepping actuator and method of manufacture therefore

Details Stepping actuator and method of manufacture therefore Stepping actuator and method of manufacture therefore

2007-09-04

2007-09-04

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S223100, C200S181000

Reexamination Certificate

active

11028409

ABSTRACT:
An embodiment of the present invention provides a stepping actuator, comprising a suspended membrane comprising a plurality of movable electrodes connected by plurality of spring hinges to a payload platform; and anchors connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes; wherein said movable electrodes of said suspended membrane and said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators.

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