Micro-actuator utilizing electrostatic and Lorentz forces,...
Micro-actuator with interdigitated combs perpendicular to a...
Micro-electrical-mechanical system (MEMS) device having a...
Micro-electro mechanical system using snapping tabs, comb...
Micro-electro-mechanical-system (MEMS) mirror device having...
Micro-electromechanical structure resonator frequency...
Micro-electromechanical structure resonator, method of...
Micro-electromechanical structure resonator, method of...
Micro-electrostatic motor
Micro-fabricated device with integrated electrostatic actuator
Micro-mirror device with increased mirror tilt
Micro-mirror with rotor structure
Micro-oscillation element having two rotational axes that...
Micro-oscillation element incorporating springs
Microactuator
Microactuator
Microactuator and method of manufacturing the same
Microactuator with displacement sensing function and...
Microactuator with displacement sensing function and...
Microactuator with displacement sensing function and...