Microactuator with displacement sensing function and...

Details Microactuator with displacement sensing function and... Microactuator with displacement sensing function and...

2008-03-18

2009-12-22

Tamai, Karl I (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000, C359S291000, C359S224200

Reexamination Certificate

active

07635939

ABSTRACT:
According to the present invention, a moving element such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section senses its displacement and a calibrating section automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section selectively connects the single displacement sensing section to a plurality of moving elements one after another, thereby cutting down the circuit for displacement sensing.

REFERENCES:
patent: 4737621 (1988-04-01), Gonsiorowski et al.
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5534740 (1996-07-01), Higuchi et al.
patent: 6057913 (2000-05-01), Brown et al.
patent: 6178069 (2001-01-01), Suzuki
patent: 6185167 (2001-02-01), Arai et al.
patent: 6206290 (2001-03-01), Giebel et al.
patent: 6220707 (2001-04-01), Bille
patent: 6411576 (2002-06-01), Furukawa et al.
patent: 6430137 (2002-08-01), Saimi et al.
patent: 6538802 (2003-03-01), Wang et al.
patent: 6708082 (2004-03-01), Oettinger et al.
patent: 6711314 (2004-03-01), Mori et al.
patent: 6798992 (2004-09-01), Bishop et al.
patent: 6952304 (2005-10-01), Mushika et al.
patent: 7068415 (2006-06-01), Mushika
patent: 7081647 (2006-07-01), Mushika
patent: 7088492 (2006-08-01), Yanagita et al.
patent: 7122786 (2006-10-01), Tochio et al.
patent: 7208857 (2007-04-01), Fasen
patent: 7245363 (2007-07-01), Mushika
patent: 7368846 (2008-05-01), Mushika et al.
patent: 2002/0061917 (2002-05-01), Li et al.
patent: 2004/0047548 (2004-03-01), Okumura et al.
patent: 2005/0063285 (2005-03-01), Mushika et al.
patent: 2006/0109538 (2006-05-01), Mushika et al.
patent: 2008/0231141 (2008-09-01), Mushika et al.
patent: 0790604 (1997-08-01), None
patent: 01-253841 (1989-10-01), None
patent: 05-260766 (1993-10-01), None
patent: 07-084196 (1995-03-01), None
patent: 09-159939 (1997-06-01), None
patent: 09-237425 (1997-09-01), None
patent: 10-222856 (1998-08-01), None
patent: 10-289468 (1998-10-01), None
patent: 11-014918 (1999-01-01), None
patent: 11-231234 (1999-08-01), None
patent: 11-305159 (1999-11-01), None
patent: 2000-182268 (2000-06-01), None
patent: 2000-235715 (2000-08-01), None
patent: 2001-174723 (2001-06-01), None
patent: 2002-236263 (2002-08-01), None
patent: 2002-236264 (2002-08-01), None
patent: 2003-029171 (2003-01-01), None
patent: 2003-185949 (2003-07-01), None
patent: 2004-048187 (2004-02-01), None
Tadashi Aruga, “Application of Adaptive Optics to Communication and Sensing”; The Journal of Institute of Electronics, Information and Communication Engineers; vol. 80, No. 12; pp. 1237-1241, (1997).
Krishnamoorthy Mali R. et al.; “Development of microelectromechanical deformable mirrors for phase modulation of light”; Optical Engineering; vol. 36, No. 2; pp. 542-548, (1997).
Hornebeck; “Digital Light Processing for High-Brigtness, High-Resolution Applications”; pp. 1-14.
Thor Juneau et al.; “Dual Axis Operation of a Micromachined Rate Gyroscope” Transducers; pp. 883-886, (1997).
Bishnu P. Gogoi et al.; “Force Balanced Micromachined Pressure Sensors”; IEEE Transactions on Electron Devcies; vol. 48, No. 8; pp. 1575-1584; (2001).
Selden B. Crary et al.; “Digital Compensation of High-performance Silicon Pressure Transducers”; Sensors and Actuators; pp. 70-72; (1990).
Julie A. Perreault et al.; “Adaptive optic correction using microelectromechanical deformable mirrors”; Optical Engineering; vol. 41, No. 3; pp. 561-566; (2002).
R.W. Corrigan et al.; “Grating Light Valve Technology for Protection Displays”; Presented in the International display Workshop, Kobe, Japan; Paper No. LAD5-1; (1998).

Affiliated with

Also associated with

Rating

Microactuator with displacement sensing function and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microactuator with displacement sensing function and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microactuator with displacement sensing function and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4125378