Microactuator with displacement sensing function and...

Details Microactuator with displacement sensing function and... Microactuator with displacement sensing function and...

2008-05-06

2008-05-06

Karl, Tamai (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000, C359S224200, C359S291000

Reexamination Certificate

active

07368846

ABSTRACT:
According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section6senses its displacement and a calibrating section15automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section7selectively connects the single displacement sensing section to a plurality of moving elements Ai one after another, thereby cutting down the circuit for displacement sensing.

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