RF plasma source and method for plasma cleaning of surface in sp

RF plasma source for material processing

RF plasma source with quasi-closed solenoidal inductor

RF power control device for RF plasma applications

RF power control device for RF plasma applications

RF tuning method for an RF plasma reactor using frequency...

RF-powered plasma accelerator/homogenizer

Scalable helicon wave plasma processing device with a non-cylind

Scanned electron cyclotron resonance plasma source

Section of pipe for a gas treatment device and device...

Selectively controllable gas feed zones for a plasma reactor

Semiconductor processing apparatus

Semiconductor wafer treating device utilizing a plasma

Shielded rf antenna

Simultaneous discharge apparatus

Slotted waveguide structure for generating plasma discharges

Slow-wave induction plasma transport

Solenoid and monocusp ion source

Source and method for generating high-density plasma with induct

Source for the generation of large area pulsed ion and electron