Method and apparatus for stabilizing switch-mode powered RF plas

Method and apparatus for the excitation of a plasma

Method and apparatus for tuning a plasma reactor chamber

Method and apparatus to monitor electrical states at a...

Method and apparatus using electron cyclotron heated plasma for

Method and device for attenuating harmonics in semiconductor...

Method and device for exciting a plasma using microwaves at the

Method and device for producing plasma with electrodes...

Method and device for removing harmonics in semiconductor...

Method and structure to segment RF coupling to silicon...

Method and system for discretely controllable plasma processing

Method for charge neutralization of surface in space with space-

Method for controlling etch uniformity

Method for controlling plasma-generating high frequency...

Method for forming magnetic fields

Method for generating a train of fast electrical pulses and...

Method for generating and maintaining a glow plasma discharge

Method for generating surface plasma

Method for making diamond and apparatus therefor

Method for operating a semiconductor processing apparatus