Method and device for exciting a plasma using microwaves at the

Details Method and device for exciting a plasma using microwaves at the Method and device for exciting a plasma using microwaves at the

1986-06-05

1988-05-17

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 31511171, 31511181, 156345, 219121PD, 219121PG, 313156, H01J 2700, B23K 900

Patent

active

047453370

ABSTRACT:
Method and device for exciting a plasma using microwaves at the electronic cyclotronic resonance.
The device for exciting a gaseous medium by microwaves comprises at least a co-axial structure for introducing the microwave power inside a multipolar confinement structure and at least one antenna coupled to said co-axial structure for the localized introduction of the microwave energy inside said multipolar magnetic confinement structure which comprises a set of permanent magnets creating a network of surfaces having a constant magnetic field and presenting locally an intensity which corresponds to the electronic cyclotronic resonance, and said antenna being positioned on said network of surfaces of constant magnetic field in an area of intensity corresponding to the electronic cyclotronic resonance.
The invention finds an application in the creation of a homogenous, isotropic plasma of large volume and high density, which is free of fields in the area of use.

REFERENCES:
patent: 4543465 (1985-09-01), Sakudo
Arnal et al, "Plasma Etching in Magnetic Multipole Microwave Discharge, Applied Physics Letters, 1984, pp. 132-134.
Sakudo et al, "Microwave Ion Source," Review of Sci. Instr., vol. 48, #7, 7/1977, pp. 134-136.

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