Method and apparatus for stabilizing switch-mode powered RF plas

Details Method and apparatus for stabilizing switch-mode powered RF plas Method and apparatus for stabilizing switch-mode powered RF plas

1994-10-14

1998-05-05

Pascal, Robert

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 20429804, H01J 724

Patent

active

057479356

ABSTRACT:
Circuitry and techniques designed to allow stable and continuous delivery of alternating power to a processing plasma with switch-mode power supply (16) include a variety of embodiments. Parallel, series, and other circuit elements connected across switching element (7) are tuned so that energy at other than the fundamental frequency is absorbed and dissipated. This energy may be only at the second harmonic or it may be across broad frequency ranges through selecting high impedance at the fundamental frequency and relatively low impedance at other frequencies. In overcoming instabilities, oscillations, and even changing class of operation of the switch-mode power supply, the stabilizing element absorbs the energy to avoid allowing it to affect switch (7) of power supply (16).

REFERENCES:
patent: 3569846 (1971-03-01), Matsuura
patent: 4375051 (1983-02-01), Theall
patent: 4383203 (1983-05-01), Stanley
patent: 4629940 (1986-12-01), Gagne et al.
patent: 4679007 (1987-07-01), Reese et al.
patent: 4877999 (1989-10-01), Knapp et al.
patent: 5187457 (1993-02-01), Chawla et al.
patent: 5189601 (1993-02-01), Sellers
patent: 5200672 (1993-04-01), Sheynberg et al.
Shuch, H. "Interstage 50-OHM for VHF Converters," Feb. 1988. Ham Radio pp. 14908-14909.
Fivash, M. "Dissipative Filters," Oct. 1988. RF Design pp. 73-83.
Cuthbert, T. "Circuit Design Using Personal Computers," 1983. Joh Wiley & Sons, Inc. pp. 377-383.

Affiliated with

Also associated with

Rating

Method and apparatus for stabilizing switch-mode powered RF plas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for stabilizing switch-mode powered RF plas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for stabilizing switch-mode powered RF plas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-57765