Steady-state, glow discharge plasma
Strike enhancement circuit for a plasma generator
Structure and the method for measuring the spectral content...
Substrate electrode plasma generator and substance/material...
Surface wave plasma processing apparatus
Surface wave plasma processing system and method of using
System and method for generating a discharge in high...
System and method for inductive coupling of an expanding...
System and method for initiating plasma production
System for high power RF plasma processing
System for ion energy control during plasma processing