Surface wave plasma processing apparatus

Details Surface wave plasma processing apparatus Surface wave plasma processing apparatus

1997-08-29

1999-03-23

Mis, David

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511141, 31511171, H05H 146

Patent

active

058864733

ABSTRACT:
A coaxial passage for supplying microwaves is vertically provided over a dielectric window forming part of a processing chamber, and a conductor plate for transmitting the microwaves is arranged over the dielectric window which is positioned on the outer circumference of the coaxial passage. A microwave transmission passage can be formed between the surface of a plasma so produced as to have a critical electron density n.sub.c, and the conductor plate thereby to transmit microwaves without any reflection along the dielectric window uniformly from the center to the outer circumference.

REFERENCES:
patent: 5466991 (1995-11-01), Berry
patent: 5646489 (1997-07-01), Kakehi et al.

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