System for high power RF plasma processing

Details System for high power RF plasma processing System for high power RF plasma processing

1999-11-24

2002-05-07

Shingleton, Michael B (Department: 2817)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C330S12400D, C330S20700P

Reexamination Certificate

active

06384540

ABSTRACT:

I. TECHNICAL FIELD
This invention generally relates to radio frequency generators which accept a power such as a dc potential and convert that power into a radio frequency, higher power output. More particularly it relates to such generators which produce power which are considered especially high when compared to those typically created from a particular type of component or particular design. The invention also may involve enhanced systems and processes (including plasma processing systems, and the like) which may include a variety of ancillary features such as these higher power generators, system specific elements, or unique processes.
Definitions
Approximately Equal
In this context, voltages, currents, impedances, or other quantities are approximately equal if the differences between them are not significant in the context of the particular application or the particular design or componentry involved and, as such, do not cause an effect which is so different in that context as to make the desired end result ineffective or unsuited to the intended purpose.
Biasing
Supplying a signal, to a circuit to establish an operating point for the low frequency impedance. This signal might comprise a variety of properties, including at least a dc voltage, or a dc current, or an alternating voltage or current at any frequency.
Bias Voltage
The name given a biasing signal if it constitutes a voltage.
Bus Power
The power provided to a power amplifier circuit which is to be converted by that circuit to radio frequency power.
Bus Voltage
The voltage provided by the bus power circuit.
Combiner
An element which achieves combining.
Combining
Utilizing together the signals of a plurality of devices, such as power amplifiers to produce one or more higher power signals. The combining may be done by transformer action, by the simple summing of currents into one or more common nodes, or any other appropriate mechanism. It would include (but not be limited to) such utilization as adding, combining, summing, or totaling.
Combining Circuitry
Any element or collection of elements which cause combining, such as from power amplifiers or from other combining circuitry.
Common Electrical Point
An electrical location, such as a node or a collection of locations in an electrical circuit which receives currents or power from other locations or nodes. The common electrical point may, through the action of one or more combiners or other circuit elements act to achieve combining.
Dividing a Potential
Causing, by any mechanism, a potential to be shared among a plurality of elements. The sharing may be even, such that each element has impressed across it substantially the same potential, or it may be uneven; in a power supply context, the concept includes that the circuit is so arranged that each load has impressed across it less than the total power supply potential.
Electromagnetic Coupling Element
An element of a plasma system which is used to couple radio frequency power to a plasma.
Establishing a Low Frequency Impedance
Creating a low frequency impedance for a circuit or collection of components through any available mechanism, including but not limited to the selection of components, varying of component values, or biasing of active elements.
Radio Frequency
An electrical alternation rate high enough that the inductance and capacitance of ordinary connection elements becomes significant. This may include at least any frequency between the broad limits of 300 kHz to 500 MHZ, and may even focus on the ISM frequencies allocated by the FCC for use by equipment designed for the Industrial, Scientific, and Medical fields, or even more specifically the frequencies of 6.78 MHz, 13.56 MHz, 27.12 MHz, or 40.68 MHz.
Radio Frequency Drive Signal
A signal which alternates at a radio frequency and which is applied to the control element of a transistor or switch element to cause the transistor to vary in conductance, or to cause the switch element to transition from an “ON” state to an “OFF” state.
High Power
A level of power too large to reasonably obtain from a low voltage single phase power line; in one context any power over about 100 watts would be considered “high”, and may even focus on the several-kilowatt range, or even more specifically 1 to 10 kW.
Impressing a Potential
In this context, arranging a circuit so that a potential appears across the object. That is, the object is subjected to the impressed potential. This might be done in a variety of ways, including at least by direct connection to the potential or by an indirect method such as passing a current through the object to create the potential.
In-Phase Components
Two signals are said to be in phase if the difference in the instants of their starting and ending alternations is small compared to their period of alternation. Two signals which are not in phase can be mathematically decomposed into fractions which are in phase and fractions which have alternations shifted by one-quarter of a period; the former are called the “in-phase components”.
Low Frequency Impedance
The ratio of voltage across an object to the current through it, measured at a frequency below the radio frequency definition.
Phase
a) The fraction of a complete cycle of an alternating signal elapsed as measured from a specified reference point; often expressed as an angle, or b) one of a multiple of power leads in a multi-phase supply system.
Series String
A connection between a plurality of elements made such that substantially most of the current from each must pass through each of the others.
Single Phase Power
A system of power distribution utilizing two wires, such as a feed wire and a return wire, between which exists an alternating voltage. Single phase power systems are often used in domestic and office environments wherein low powers are required, and may be contrasted with multi-phase power systems, which have at least three wires and are often used in high power industrial environments.
Switchmode
A circuit in which the main power element is predominately in either an “ON” state, wherein the voltage across the element is small compared to the “OFF” state voltage; or in an “OFF” state, wherein the current passing through the element is small compared to the “ON” state current; and wherein a condition of simultaneous substantial voltage and current is transient.
Tiered Combiner
An element which effects tiered combining.
Tiered Combining
Utilizing together the outputs of a first grouping of devices, such as power amplifiers into a first group (which may be termed level one), followed by combining the outputs of the first group into a second group (level two), continuing (if necessary and desired) until one or more final outputs are formed. The groupings may be in threes, fours or any other grouping, but are commonly in pairs. For example, eight amplifier outputs may be combined in pairs at level one into four nodes, the four nodes combined in pairs at level two into two nodes, and these last two combined in pairs at a third level into a single output. In this example, the level two outputs could be left separate as dual independent outputs without violating the concept of tiered combining.
II. BACKGROUND
Originally, except for some early use in diathermy machines, high power radio frequency generators were used principally as sources of energy for radio frequency transmitters. Today, operating at frequencies from about 100 kHz to about 500 MHZ, radio frequency generators are widely used for plasma processing, as well as the energy source for lasers, high frequency lighting, and dielectric heating or sealing equipment, and for providing the accelerating potential in electron and ion accelerators.
Virtually all radio frequency generators for these purposes employ an element which converts direct current (dc) power, or steady voltage, to radio frequency power. This element is called an “inverter” or “converter” at lower frequencies, but at higher frequencies it is often termed a Power Amplifier, or PA, for historical reasons. Note that as used here the term “amplifier” includes, b

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