Steady-state, glow discharge plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating

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118723E, 31323131, 20429804, H01J 724, H05B 3126

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053878426

ABSTRACT:
A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. The electrodes are located within an enclosure capable of maintaining an atmosphere other than atmospheric air between the electrode surfaces. Space between the electrodes is occupied by a noble gas such as helium, neon, argon, etc. or mixtures thereof.

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English language translation of above from original German.
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