Microwave reactive gas discharge device
Microwave stripline applicators
Miniature pulsed vacuum arc plasma gun and apparatus for thin-fi
Modular low aspect ratio-high beta torsatron
Modular segmented cathode plasma generator
Monolithic miniaturized inductively coupled plasma source
Multi chamber plasma process system
Multi-electrode plasma source
Multi-grid ion beam source for generating a highly...
Multi-mode treater with internal air cooling system
Multiple electrode plasma reactor power distribution system
Multiple frequency plasma processor method and apparatus
Multiple frequency plasma processor method and apparatus
Multirate processing for metrology of plasma RF source