Mask data processing method for optimizing hierarchical...

Matching method for designing layout patterns on a photomask...

MEEF reduction by elongation of square shapes

Method and apparatus for detecting lithographic hotspots in...

Method and apparatus for determining the effect of process...

Method and apparatus for modeling long-range EUVL flare

Method and apparatus for using a database to quickly...

Method and program for pattern data generation using a...

Method and system for correcting a mask pattern design

Method and system for implementing parallel processing of...

Method and system for post-routing lithography-hotspot...

Method for creating mask layout data, apparatus for creating...

Method for double patterning lithography

Method for modifying photomask layout

Method for processing optical proximity correction

Method of designing semiconductor device including density...

Method of verifying a layout pattern

Method, system, and computer program product for predicting...

Methodology and system for determining numerical errors in...

Model-based SRAF insertion