Methods and apparatus for deposition of thin films

Methods and apparatus for material deposition using primer

Methods and apparatus for processing microfeature...

Methods and apparatus for processing microfeature...

Methods and apparatus for treating a work piece with a...

Methods and apparatus for vapor processing of micro-device...

Methods and devices to reduce defects in dielectric stack...

Methods and structures for promoting stable synthesis of...

Methods and structures for promoting stable synthesis of...

Methods for applying a hybrid thermal barrier coating

Methods for atomic-layer deposition of aluminum oxides in...

Methods for chemical vapor deposition of tungsten on silicon...

Methods for coating adherent diamond films on cemented tungsten

Methods for controlling formation of deposits in a...

Methods for cutting articles containing at least a...

Methods for depositing metal films onto diffusion barrier...

Methods for depositing polycrystalline films with engineered...

Methods for forming a ruthenium-based film on a substrate

Methods for forming silicon comprising films using...

Methods for forming thin layers of materials on micro-device...