Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2005-11-18
2008-10-28
Meeks, Timothy (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
C427S561000, C427S585000, C427S587000, C427S592000, C118S715000, C118S724000
Reexamination Certificate
active
07442413
ABSTRACT:
Methods and apparatus for controlling and delivering a vaporous element or compound, for example, selenium or sulfur, from a solid source to a work piece are provided. The methods and apparatus may be used in photovoltaic cell manufacturing. The apparatus may comprise a treatment chamber, for example, a box furnace or a tube furnace. The chamber may include an inner enclosure, an outer enclosure, and heating sources capable of independent thermal control, for example, in compliance with a predetermined heating schedule. The apparatus include devices and mechanisms for isolating the treatment chambers from the ambient environment. The methods and apparatus may be adapted to control metalloid vapor delivery in photovoltaic cell processing, for example, the processing of CIGS and CIGSS photovoltaic cells.
REFERENCES:
patent: 4154631 (1979-05-01), Schoolar
patent: 4325986 (1982-04-01), Baron et al.
patent: 4526809 (1985-07-01), Hall et al.
patent: 4615298 (1986-10-01), Yamazaki
patent: 4910043 (1990-03-01), Freeman et al.
patent: 5045409 (1991-09-01), Eberspacher et al.
patent: 5138973 (1992-08-01), Davis et al.
patent: 5248349 (1993-09-01), Foote et al.
patent: 5372646 (1994-12-01), Foote et al.
patent: 5730852 (1998-03-01), Bhattacharya et al.
patent: 5773088 (1998-06-01), Bhat
patent: 5804054 (1998-09-01), Bhattacharya et al.
patent: 5904771 (1999-05-01), Tasaki et al.
patent: 5910336 (1999-06-01), Ishihara et al.
patent: 6048442 (2000-04-01), Kushiya et al.
patent: 6092669 (2000-07-01), Kushiya et al.
patent: 6409837 (2002-06-01), Hillman
patent: 6518086 (2003-02-01), Beck et al.
patent: 6783627 (2004-08-01), Mahawili
patent: 6787485 (2004-09-01), Probst
patent: 6858120 (2005-02-01), Ahn et al.
patent: 6863021 (2005-03-01), Sneh
patent: 2003/0230338 (2003-12-01), Menezes
patent: 2006/0222768 (2006-10-01), Faguet
patent: 0211529 (1987-02-01), None
patent: 0978882 (2000-09-01), None
patent: 1136586 (2001-09-01), None
Slocum, Alexander H., “Precision Machine Design—Topic 17—Flexures,” 1993 (7 pages).
PCT International Search Report for corresponding application # PCT/US2006/036832 filed Sep. 21, 2006, European Patent Office Searching Authority, dated Jan. 25, 2007.
Written Opinion of the International Searching Authority for corresponding application # PCT/US/2006/036832 filed Sep. 21, 2006, dated Jan. 25, 2007.
Tsuyoshi Ohashi, et al., Thin Films Prepared by Sulfurization of Precursors Consisting of Metallic and Gallium Sulfide Layers, Jpn. J. Appl. Phys. vol. 37 (1998), pp. 6530-6534.
S. Gall, et al., Material analysis of PVD-grown indium sulphide buffer layers for Cu(In,Ga) Se2-based solar cells; Dec. 10, 2004, pp. 138-141.
Berens Troy
Tuttle John R.
Zwaap Robert F.
Daystar Technologies, Inc.
Heslin Rothenberg Farley & & Mesiti P.C.
Meeks Timothy
Turocy David
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