Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate
2008-03-18
2008-03-18
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Plural coatings applied by vapor, gas, or smoke
C427S248100, C427S255394, C427S255391
Reexamination Certificate
active
10646673
ABSTRACT:
The present disclosure provides methods and apparatus that may be used to process microfeature workpieces, e.g., semiconductor wafers. Some aspects have particular utility in depositing TiN in a batch process. One implementation involves pretreating a surface of a process chamber by contemporaneously introducing first and second pretreatment precursors (e.g., TiCl4and NH3) to deposit a pretreatment material on a the chamber surface. After the pretreatment, the first microfeature workpiece may be placed in the chamber and TiN may be deposited on the microfeature workpiece by alternately introducing quantities of first and second deposition precursors.
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Basceri Cem
Beaman Kevin L.
Breiner Lyle D.
Doan Trung T.
Kubista David J.
Meeks Timothy
Micro)n Technology, Inc.
Perkins Coie LLP
Turocy David
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