Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-10-10
2006-10-10
Chen, Bret (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
C427S255280
Reexamination Certificate
active
07118781
ABSTRACT:
A method for controlling parasitic deposits in a deposition system for depositing a film on a substrate, the deposition system defining a reaction chamber for receiving the substrate and including a process gas in the reaction chamber and an interior surface contiguous with the reaction chamber, includes flowing a buffer gas between the interior surface and at least a portion of the process gas to form a gas barrier layer such that the gas barrier layer inhibits contact between the interior surface and components of the process gas.
REFERENCES:
patent: 4748135 (1988-05-01), Frijlink
patent: 4756927 (1988-07-01), Black et al.
patent: 4778693 (1988-10-01), Drozdowicz et al.
patent: 4800105 (1989-01-01), Nakayama et al.
patent: 4924807 (1990-05-01), Nakayama et al.
patent: 4989541 (1991-02-01), Mikoshiba et al.
patent: 5005519 (1991-04-01), Egermeier et al.
patent: 5027746 (1991-07-01), Frijlink
patent: 5108540 (1992-04-01), Frijlink
patent: 5334277 (1994-08-01), Nakamura
patent: 5433169 (1995-07-01), Nakamura
patent: 5449535 (1995-09-01), Streater
patent: 5620524 (1997-04-01), Fan et al.
patent: 5669976 (1997-09-01), Yuuki et al.
patent: 5674320 (1997-10-01), Kordina et al.
patent: 5695567 (1997-12-01), Kordina et al.
patent: 5704985 (1998-01-01), Kordina et al.
patent: 5759263 (1998-06-01), Nordell et al.
patent: 5792257 (1998-08-01), Kordina et al.
patent: 5851589 (1998-12-01), Nakayama et al.
patent: 5879462 (1999-03-01), Kordina et al.
patent: 6030661 (2000-02-01), Kordina et al.
patent: 6039812 (2000-03-01), Ellison et al.
patent: 6048398 (2000-04-01), Vehanen et al.
patent: 6093253 (2000-07-01), Löfgren et al.
patent: 6179913 (2001-01-01), Solomon et al.
patent: 6299683 (2001-10-01), Rupp et al.
patent: 6402849 (2002-06-01), Kwag et al.
patent: 0 959 150 (1999-11-01), None
patent: 53 126867 (1978-11-01), None
patent: 59209643 (1983-05-01), None
patent: 2002 170774 (2002-06-01), None
patent: WO 98/44164 (1998-10-01), None
patent: WO 02/38839 (2002-05-01), None
International Search Report and Written Opinion of the International Searching Authority for Application No. PCT/US2004/004943 mailed on May 11, 2005.
O'Loughlin Michael John
Paisley Michael James
Sumakeris Joseph John
Chen Bret
Cree Inc.
Myers Bigel Sibley & Sajovec P.A.
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