High temperature susceptor

Details High temperature susceptor High temperature susceptor

1996-07-12

1998-11-17

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Work support

118725, 118500, C23C 1600

Patent

active

058370587

ABSTRACT:
A susceptor with improved resistance to thermal cycling and chemical attack between processing and cleaning cycles. The susceptor comprises a top surface is surrounded by a lip, the lip having a beveled inner side, a top side, an outer side, a first rounded edge between the top side and the outer side, a second rounded edge between the top side and the inner side, and a third rounded edge between the inner side and the top surface. The susceptor comprises a body of graphite covered by a coating of aluminum nitride.

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