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Wafer backside plate for use in a spin, rinse, and dry...

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer backside plate for use in a spin, rinse, and dry...

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Wafer cassette and cleaning system adopting the same

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Patent

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Wafer chucking apparatus and method for spin processor

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Wafer chucking apparatus for spin processor

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer cleaning

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer cleaning

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent

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Wafer cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer cleaning apparatus and structure for holding and transferr

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
Patent

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Wafer cleaning apparatus with anticipating malfunction of pump

Cleaning and liquid contact with solids – Apparatus – With alarm – signal – indicating – testing – inspecting,...
Reexamination Certificate

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Wafer cleaning apparatus with multiple wash-heads

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Wafer cleaning apparatus with probe cleaning and methods of...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Wafer cleaning apparatus with rotating cleaning solution injecti

Cleaning and liquid contact with solids – Processes – Work handled in bulk or groups
Patent

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Wafer cleaning device and tray for use in wafer cleaning device

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Wafer cleaning device for use in manufacturing a semiconductor d

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
Patent

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Wafer cleaning device, wafer cleaning method and chemical...

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer cleaning method

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Wafer cleaning method

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent

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Wafer cleaning method

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate

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