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Wafer cleaning method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Wafer cleaning method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Wafer cleaning method and apparatus therefor

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Patent

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Wafer cleaning method and apparatus therefore

Cleaning and liquid contact with solids – Processes – Gas or vapor condensation or absorption on work
Patent

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Wafer cleaning module and method for cleaning the surface of...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Wafer cleaning module and method for cleaning the surface of...

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
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Wafer cleaning system

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Wafer cleaning system

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Wafer cleaning system

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Patent

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Wafer cleaning system with progressive megasonic wave

Cleaning and liquid contact with solids – Apparatus – Automatic controls
Patent

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Wafer cleaning tank

Cleaning and liquid contact with solids – Apparatus – Miscellaneous
Patent

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Wafer cleaning with dissolved gas concentration control

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Wafer container cleaning system

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer container cleaning system

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Wafer container cleaning system

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
Reexamination Certificate

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Wafer container cleaning system

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Wafer container washing apparatus

Cleaning and liquid contact with solids – Apparatus – For work having hollows or passages
Reexamination Certificate

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Wafer container washing apparatus

Cleaning and liquid contact with solids – Apparatus – For work having hollows or passages
Reexamination Certificate

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Wafer drying apparatus

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Wafer drying apparatus

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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