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Sputtering target fixture

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering target for forming high-resistance transparent...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering target producing few particles, backing plate or...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering target protection device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Sputtering target, method of producing the target, optical...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering target, transparent conductive film, and method...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering using a plasma-shaping magnet ring

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering with collinator cleaning within the sputtering chambe

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Stable high rate reactive sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Staged aluminum deposition process for filling vias

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Staged aluminum deposition process for filling vias

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Staggered target tiles

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Stamper forming method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Stationary aperture plate for reactive sputter deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Step coverage and overhang improvement by pedestal bias voltage

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Step coverage and overhang improvement by pedestal bias...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Storage plate support for receiving disk-shaped storage plates

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Stress tunable tantalum and tantalum nitride films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate coated with an MgO layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate coated with an MGO-layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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