Sputtering target fixture
Sputtering target for forming high-resistance transparent...
Sputtering target producing few particles, backing plate or...
Sputtering target protection device
Sputtering target, method of producing the target, optical...
Sputtering target, transparent conductive film, and method...
Sputtering using a plasma-shaping magnet ring
Sputtering with collinator cleaning within the sputtering chambe
Stable high rate reactive sputtering
Staged aluminum deposition process for filling vias
Staged aluminum deposition process for filling vias
Staggered target tiles
Stamper forming method
Stationary aperture plate for reactive sputter deposition
Step coverage and overhang improvement by pedestal bias voltage
Step coverage and overhang improvement by pedestal bias...
Storage plate support for receiving disk-shaped storage plates
Stress tunable tantalum and tantalum nitride films
Substrate coated with an MgO layer
Substrate coated with an MGO-layer