Sweeping method and magnet track apparatus for magnetron sputter
Switch with improved threshold voltage
System and apparatus for control of sputter deposition process
System and method for coating substrates with improved...
System and method for controlling deposition thickness by...
System and method for controlling deposition thickness using...
System and method for controlling deposition thickness using...
System and method for controlling thin film defects
System and method for DC sputtering oxide films with a...
System and method for depositing plural thin film layers on a su
System and method for depositing tungsten/titanium films
System and method for detecting non-cathode arcing in a...
System and method for fabrication of precision optical ramp filt
System and method for feedforward control in thin film...
System and method for forming base coat and thin film layers...
System and method for handling and masking a substrate in a...
System and method for making thin-film structures using a...
System and method for making thin-film structures using a...
System and method for performing sputter deposition using a...
System and method for performing sputter deposition using a...