System and method for feedforward control in thin film...

Details System and method for feedforward control in thin film... System and method for feedforward control in thin film...

2007-06-19

2007-06-19

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S192120, C204S298030, C204S298070

Reexamination Certificate

active

10960621

ABSTRACT:
A system and method for feedforward control in thin film coating processes. A standard PID feedback control system that continuously monitors two or more process variables in a reactive sputtering process is combined with a feedforward control system to improve system performance. The control system enables much faster stabilization of the reactive sputtering process during target start-up, and improves control of the process once a steady-state operating condition has been reached following target start-up.

REFERENCES:
patent: 4428811 (1984-01-01), Sproul et al.
patent: 4851095 (1989-07-01), Scobey et al.
patent: 4883574 (1989-11-01), dos Santos Pereina Ribeiro
patent: 4895631 (1990-01-01), Wirz et al.
patent: 5292417 (1994-03-01), Kugler
patent: 5556520 (1996-09-01), Latz
patent: 5561599 (1996-10-01), Lu
patent: 5674194 (1997-10-01), Jung et al.
patent: 5692485 (1997-12-01), Maki et al.
patent: 5849162 (1998-12-01), Bartolomei et al.
patent: 5942089 (1999-08-01), Sproul et al.
patent: 6106676 (2000-08-01), Terry et al.
patent: 6106785 (2000-08-01), Havlena et al.
patent: 6132563 (2000-10-01), Frach et al.
patent: 6424906 (2002-07-01), Zhu et al.
patent: 6537428 (2003-03-01), Xiong et al.
Ziegler, J.G. and N.B. Nichols,“Optimum Settings for Automatic Controllers,” Tras. ASME, 64, p. 759 (1942).

Affiliated with

Also associated with

Rating

System and method for feedforward control in thin film... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for feedforward control in thin film..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for feedforward control in thin film... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3822040