Apparatus for conditioning the atmosphere in a vacuum chamber

Apparatus for contactless real-time in-situ monitoring of a chem

Apparatus for controlled spray etching

Apparatus for controlling a plasma reaction

Apparatus for controlling etch rate when using consumable electr

Apparatus for controlling the temperature of a gas...

Apparatus for controlling the temperature of a gas...

Apparatus for controlling the voltage applied to an...

Apparatus for conveying a semiconductor wafer

Apparatus for deposition of fluid and gaseous media on substrate

Apparatus for detecting an end point of etching

Apparatus for detecting CMP endpoint in acidic slurries

Apparatus for detecting plasma etch endpoint in...

Apparatus for detecting the endpoint of a photoresist...

Apparatus for determining removed amount of wafer

Apparatus for determining the etch rate of nonconductive materia

Apparatus for dry etching

Apparatus for dry etching

Apparatus for enhanced inductive coupling to plasmas with reduce

Apparatus for etching a continuously moving thin metal strip