R.F. plasma reactor with larger-than-wafer pedestal conductor

Radial antenna and plasma processing apparatus comprising...

Radial magnetic field enhancement for plasma processing

Radio frequency electron cyclotron resonance plasma etching appa

Radio frequency induction/multipole plasma processing tool

Raw bar stripping off and cleaning jig and raw bar stripping...

Reactive ion etch chamber wafer masking system

Reactive ion etching apparatus

Reactive ion etching apparatus

Reactive ion etching appartus

Reactive ion etching device

Reactor apparatus for plasma etching or deposition

Reactor chamber for an externally excited torroidal plasma...

Reactor for processing a semiconductor wafer

Reactor for processing a semiconductor wafer

Reactor with remote plasma system and method of processing a...

Real time measurement of etch rate during a chemical etching pro

Real time measurement of etch rate during a chemical etching pro

Reciprocating cutting tool and method

Reciprocating gas valve for pulsing a gas