Apparatus for deposition of fluid and gaseous media on substrate

Details Apparatus for deposition of fluid and gaseous media on substrate Apparatus for deposition of fluid and gaseous media on substrate

1984-07-09

1985-06-04

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118 50, 118728, 118733, 134 99, 156643, 156646, 406 88, 355 76, 427 85, 4272481, 4272555, 430434, B44C 122, B08B 504, C23C 1308, B05D 512

Patent

active

045212686

ABSTRACT:
Apparatus (10) for deposition of fluid and gaseous media on substrates (18), comprising a cabin (32), in which series of segments (34, 36, 38 . . . 68) are located aside a central passage (80, 96). Media, flowing through apertures between these segments towards and along substrates, passing through the passage, create micro-sized cushions (20, 22) aside such substrates for floating, transport and processing thereof.

REFERENCES:
patent: 2848820 (1958-08-01), Wallin et al.
patent: 3704685 (1972-12-01), Neumann et al.
patent: 4292745 (1981-10-01), Caratsch
patent: 4341592 (1982-07-01), Shortes et al.
patent: 4406388 (1983-09-01), Takashi et al.
patent: 4480777 (1984-11-01), Suzuki et al.

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