Baffle plate design for decreasing conductance lost during preci
Baffle plate of dry etching apparatus for manufacturing...
Bare aluminum baffles for resist stripping chambers
Beat frequency modulation for plasma generation
Beat frequency modulation for plasma generation
Board Level Decapsulator
Boron carbide parts and coatings in a plasma reactor
Brim and gas escape for non-contact wafer holder
Broad-band adjustable power ratio phase-inverting plasma reactor
Bubble monitor for semiconductor manufacturing
Bubble plate for etching and etching apparatus using the same