Apparatus for conveying a semiconductor wafer

Details Apparatus for conveying a semiconductor wafer Apparatus for conveying a semiconductor wafer

1984-02-21

1986-04-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156643, 156646, 204298, 414222, 414744R, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

045840458

ABSTRACT:
A transfer apparatus for conveying a semiconductor wafer between a first location and a second location comprises transfer arm means including first and second elongated arm members each having first and second ends. The first end of the first arm member is pivotally supported at a point generally midway between the two locations and the first end of the second arm member is pivotally supported by the first arm member proximate to the second end thereof. The first and second arm members are of sufficient length and are cooperative to pivot to at least a first position in which at least a part of the second arm extends to the first location, a second position in which at least a part of the second arm member extends to the second location and an intermediate position. Arm member actuator means are provided for pivoting the first and second arm members to the first, second and intermediate positions.

REFERENCES:
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4094722 (1978-06-01), Yamamoto et al.
patent: 4149923 (1979-04-01), Uehara et al.
patent: 4252595 (1981-02-01), Yamamoto et al.
patent: 4282924 (1981-08-01), Faretra
patent: 4318767 (1982-03-01), Hijikata et al.
patent: 4341582 (1982-07-01), Kohman et al.
patent: 4388034 (1983-06-01), Takahashi
patent: 4392915 (1983-07-01), Zajac
patent: 4483654 (1984-11-01), Koch et al.

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