Gas distribution plate assembly for providing laminar gas...

Gas injector and apparatus including the same

Gas introducing mechanism and processing apparatus for...

Gas supply member and plasma processing apparatus

Lid assembly for a processing system to facilitate...

Mask etch plasma reactor with variable process gas distribution

Method and apparatus for asymmetric gas distribution in a...

Method and apparatus for restricting process fluid flow...

Non-plasma reaction apparatus and method

Plasma processing device

Plasma processing system for treating a substrate

Plasma reactor apparatus with independent capacitive and...

Plasma reactor cooled ceiling with an array of thermally...

Processing apparatus having particle counter and cleaning...

Processing device, electrode, electrode plate, and...

Processing system

Processing system

Processing system

Quick-change precursor manifold for large-area CVD and PECVD

Shower head structure and treating device