Gas injector and apparatus including the same

Details Gas injector and apparatus including the same Gas injector and apparatus including the same

2006-03-31

2010-12-07

Kackar, Ram N (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With gas inlet structure

C118S715000

Reexamination Certificate

active

07846292

ABSTRACT:
A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.

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