Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate
2011-04-12
2011-04-12
Chen, Keath T (Department: 1712)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With gas inlet structure
C118S7230ER
Reexamination Certificate
active
07922864
ABSTRACT:
A tube-array showerhead for CVD or PECVD on large substrates delivers precursors to a process chamber via an array of tubes drilled with precision holes. The tubes rapidly become contaminated with use and must be changed frequently to maintain process quality. An improved manifold for a tube-array showerhead, intended for processes with a low pressure differential between the tubes and process chamber, includes holding-stubs to hold each tube by its ends outside the manifold block. At least one holding-stub for each tube is spring-loaded along the direction of the tube's operating axis. Contaminated tubes can be removed, and clean tubes installed, without disassembling the manifolds or disturbing any high-pressure-differential seals to the ambient atmosphere or precursor supplies. This invention reduces production costs by decreasing chamber down-time and reducing the risk of creating leaks when tubes are changed.
REFERENCES:
patent: 3464436 (1969-09-01), Bruning
patent: 6294740 (2001-09-01), Van Swearingen
patent: 7575024 (2009-08-01), Zeiber et al.
Chen Keath T
Moy Jeffrey D.
OptiSolar, Inc.
Weiss Jeffrey
Weiss & Moy P.C.
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