MEMS apparatus and method of manufacturing the same
MEMS device and fabrication method thereof
MEMS device and fabrication method thereof
MEMS device having a layer movable at asymmetric rates
MEMS device having a movable electrode
MEMS device having a trilayered beam and related methods
MEMS device having flexures with non-linear restoring force
MEMS device made of transition metal-dielectric oxide materials
MEMS device trench plating process and apparatus for through...
MEMS device, MEMS device module and acoustic transducer
MEMS device, MEMS device module and acoustic transducer
MEMS devices and methods for inhibiting errant motion of...
MEMS devices and methods of manufacture
MEMS devices and methods of manufacture thereof
MEMS devices having support structures
MEMS devices with voltage driven flexible elements
MEMS element, MEMS device and MEMS element manufacturing method
MEMS having a three-wafer structure
MEMS hybrid structure having flipped silicon with external...
MEMS microphone