Sensor system
Sensor with at least one micromechanical structure and...
Sensor with diaphragm sensor chip
Sensors for use in high vibrational applications and methods for
Shape memory alloy information storage device
Signal routing in a hermetically sealed MEMS device
Silicon capacitive microphone
Silicon integrated accelerometer
Silicon microphone
Silicon pressure micro-sensing device and the fabrication...
Silicon tab edge mount for a wafer level package
Silicon-mass angular acceleration sensor
Silicon-on-sapphire transducer
Single chip multiple range pressure transducer device
Single crystal silicon micromirror and array
Single crystal silicon sensor with additional layer and...
Single crystal tunneling sensor or switch with silicon beam...
Single crystal, dual wafer, tunneling sensor or switch with...
Single crystal, tunneling and capacitive, three-axes sensor...
Single unit position sensor