Self sealed aligned contact incorporating a dopant source
Self-aligned alloy capping layers for copper interconnect...
Self-aligned barrier formed with an alloy having at least...
Self-aligned composite insulator with sub-half-micron...
Self-aligned conductive plugs in a semiconductor device
Self-aligned contact areas for sidewall image transfer...
Self-aligned contact formation
Self-aligned contact plugs
Self-aligned contact process
Self-aligned contact process in semiconductor fabrication...
Self-aligned contact set
Self-aligned contact studs for semiconductor structures
Self-aligned contact studs for semiconductor structures
Self-aligned contact through a conducting layer
Self-aligned contact/borderless contact opening and method...
Self-aligned contacts to gates
Self-aligned copper interconnect architecture with enhanced...
Self-aligned copper silicide formation for improved...
Self-aligned corrosion stop for copper C4 and wirebond
Self-aligned ion implanted transition metal contact diffusion ba