Self-aligned contact set

Details Self-aligned contact set Self-aligned contact set

2010-06-29

2011-11-15

Nguyen, Ha Tran T (Department: 2829)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257S775000, C257SE21440, C257SE21507, C438S640000

Reexamination Certificate

active

08058733

ABSTRACT:
A self-aligned contact includes a lower contact disposed in a dielectric layer of a substrate and an upper contact disposed in the dielectric layer and directly on the lower contact, and electrically connected to the lower contact. The profile of the upper contact and the lower contact is zigzag.

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