Selectively coating bond pads
Selectively converted inter-layer dielectric
Selectively formed contact structure
Self sealed aligned contact incorporating a dopant source
Self-aligned alloy capping layers for copper interconnect...
Self-aligned composite insulator with sub-half-micron...
Self-aligned contact formation
Self-aligned contact plugs
Self-aligned contact process
Self-aligned contact studs for semiconductor structures
Self-aligned contacts to gates
Self-aligned copper interconnect architecture with enhanced...
Self-aligned copper silicide formation for improved...
Self-aligned ion implanted transition metal contact diffusion ba
Self-aligned last-metal C4 interconnection layer for Cu...
Self-aligned metal to form contacts to Ge containing...
Self-aligned semiconductor interconnect barrier and...
Self-aligned silicide contacts formed from deposited silicon
Self-aligned, lateral diffusion barrier in metal lines to...
Self-aligning contact and interconnect structure